구분

내용

비고

제품의 구성

1PM+ 1L/L

Wafer size

2, 4”,6”, 8”

Tray 가능

Load Lock

Vacuum L/L, 1wf/Auto loading

Gas line

N2, He, N2O, NH3,

SiH4, NF3, Ar, O2

MFC 8 ea+

2spares

ALD Source Canister

Hot Temp (>100C) 1~3 EA, R.T 1EA

Footprint

1950 X 800 X 1650 mm 

Chuck Heater

< 400 °C

Source Power

13.56MHz, 600W

Utility

PM Dry Pump (>8000l/min),

LL Pump (>300 l/min)

(Option)