구분

내용

비고

제품의 구성

1PM+ 1L/L

Wafer size

2, 4”,6”, 8”

Tray 가능

Load Lock

Vacuum L/L, 1wf/Auto loading

Gas line

N2, He, N2O, NH3,

SiH4, NF3, Ar

MFC 7 ea+

3spares

Footprint

1950 X 800 X 1880mm

Chuck Heater

< 400 °C

Source Power

13.56MHz, 600W

Remote Plasma

Source (RPG)

2~4MHz, 4~8kW

Utility

PM Dry Pump (>8000l/min),

LL Pump (>300 l/min) 

(Option)