구분

내용

비고

제품의 구성

1PM+ 1L/L

Wafer size

2, 4”,6”, 8”

Tray 가능

Load Lock

Vacuum L/L, 1wf/Auto loading

Gas line

Ar, WF6, WF6,

SiH4, H2, H2, Ar, NF3

MFC 8 ea+

2spares

Footprint

1450 X 800 X 1520mm 

Chuck Heater

 < 450 °C

Source Power

13.56MHz, 600W

Utility

PM Dry Pump (>8000l/min),

LL Pump (>300 l/min) 

(Option)