구분

내용

비고

제품의 구성

2PM+ 1L/L, Cluster Tool

Wafer size

2, 4”,6”, 8”

Tray 가능

Load Lock

Vacuum L/L, 1wf/Auto loading

Gas line

Ar, SiH4, N2, NH3, N2O, NF3, He

MFC 7 ea+

3spares

Footprint

1450 X 800 X 1520mm

Chuck Heater

 < 400 °C

Source Power

13.56MHz, 600W

Utility

PM Dry Pump (>8000l/min),

LL Pump (>300 l/min) 

(Option)