구분(M/D)

내용

비고

JPECVD-2000

기본 PECVD,

CCP 13.56MHz/600W, 2”~8”

특허출원

JPECVD-2000A

PECVD, Dual CCP 13.56MHz/600W,

400kHz/1kW, RPG, 2”~8”

JCM-CVAD-2000

PECVD & ALD 융복합 장치,

Tripple Shower Head,

CCP 13.56MHz/600W 2”~8”

특허출원

JCM-CVAD-2000A

PECVD & ALD 융복합 장치,

Tripple Shower Head,

Dual CCP 13.56MHz/600W,

400kHz/1kW, RPG, 2”~8”

JWCVD-2000

Tungsten CVD, (PE)CVD,

CCP 13.56MHz/600W, 2”~8”

JPECVD-2000CT

기본 PECVD,

Multi Chamber 13.56MHz/600W,

2”~8”

JCM-CVAD-3000

12”

개발중