구분

내용

비고

제품의 구성 및 특징

1PM+ 1L/L,

Ultra Low Temperature

(-80C~40C),

CCP RIE,  ICP RIE,

Dual Frequency & DC Pulse,

60MHz, 400kHz,

Wafer size

4”,6”, 8”

Load Lock

Vacuum L/L, 1wf/Auto loading

Gas line

CCP: Ar, N2, CF4, C4F8, Cl2, N2,

CHF3, HF ICP: Ar, N2, SF4,

C4F8, Cl2, N2, BCl3

MFC 7 ea+

3spares

Footprint

2200 X 900 X 1630(mm)

Utility

PM Dry Pump (>1200l/min),

LL Pump (>300 l/min)

(Option)